This user note covers all the models for KQ150R
Quick Overview
The KQ150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications.
The KQ150R is available in three formats:
- KQ150R S - a compact rotary pumped sputter coater, suitable for non-oxidising metals
- KQ150R E - a compact rotary pumped carbon fibre coater suitable for SEM applications
- KQ150R ES - a compact rotary pumped combined sputter coater and carbon evaporator
Key Features
- Metal sputtering or carbon evaporation - or both - in one space saving design
- Rotary pumped sputter coating - allows sputtering of a wide range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
- Carbon fibre coating - ideal for SEM carbon coating applications (eg EDS and WDS)
- Advanced design carbon evaporation gun - simple operation, reproducible results
- Glow discharge option - for modification of sample surface properties (eg hydrophobic to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
- Control of evaporation current profile - ensures consistently reproducible carbon films
- Repeatable thickness control using the film thickness monitor option
- Fully automatic touch screen control - rapid data input, simple operation
- Multiple, customer defined coating protocols can be stored - ideal for multi-user labs
- Automatic vacuum control, which can be pre-programmed to suit the process and material - no needle valve to adjust
- "Intelligent" recognition system - automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard)
- Thick film capabilities - up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece moulded case - easy maintenance and service access
- Ethernet with local FTP server connection - simple programmer updates
- Power factor correction - complies with current legislation (CE Certification) - efficient use of power means reduced running costs
- Three-year warranty
Product Description
Ideal for SEM applications
KQ150R is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the KQ150R can be a top-of-the-range sputter coater for scanning electron microscopy (SEM), a carbon coater suitable for SEM (eg EDS and WDS), or both, in a single easy to use system.
Moulded case with colour touch-screen
The KQ150R is presented in a custom moulded, one-piece case. The colour touch screen allows multiple users to input and store coating protocols. The case houses all the working components. Automatic bleed control ensures optimum vacuum conditions during sputtering. The vacuum chamber has an external diameter of 165mm (6.5") and comes with an integral implosion guard. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.
Sputter coating, carbon coating or both
The KQ150R is available in three formats, each with a range of optional accessories:
- KQ150R S - a compact rotary pumped sputter coater, suitable for non-oxidising (noble) metals. A wide selection of sputtering targets is available, which are highly recommended for SEM applications.
- KQ150R E - a compact rotary pumped carbon fibre coater suitable for SEM applications (eg EDS and WDS). The system uses carbon fibre / cord as standard.
- KQ150R ES - a combined system with both sputtering and carbon fibre coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.
Each of the above can be fitted with a range of optional accessories (eg glow discharge, carbon rod coating, film thickness monitor). See options for details.
Rapid data entry
At the operational heart of KQ150R is a simple colour touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are already stored.
Maintenance
The intuitive touch screen interface features maintenance prompts which highlight:
- Time of last clean
- Coating time since last cleaned
- System 'on time'
- Time of last service
Additional Information
| Glow Discharge Attachment | The primary application of glow discharge is as a technique for the surface modification, or 'wetting', of newly-evaporated transmission electron microscopy (TEM) carbon support films.HydrophilisationFreshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, thus allowing easy spreading of aqueous suspensions. With subsequent magnesium acetate treatment the surface is made hydrophilic and positively charged.In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional absorption of selected biomolecules | ||||||||||||||||||||||||||||||||||||||||||||
| Options and Accessories (including details of coating head inserts and specimen stages that are fitted as standard) | Coating head optionsA range of interchangeable, plug-in style coating head inserts are available:* Sputtering head insert - suitable for non-oxidising (noble) metals. Supplied with a 57mm ? x 0.1mm thick gold (Au) target as standard (R S and R ES versions). For additional targets see Ordering Information * Additional sputter head inserts - available for quick coating material change (R S and R ES versions) * Carbon fibre evaporation head insert - fitted as standard to R E and R ES versions * Carbon rod evaporation head insert - for 3.05mm ? rods (available as an option for R E and R ES versions). Specimen stagesThe KQ150R has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):* Rotation stage - 50mm ? (supplied as standard). This stage only rotates - no tilt or height adjustment * Rotate-tilt stage - 50mm ? with height adjustment (target to stage height variable between 37-60mm). Tilt angle can be pre-set (up to 90°) * Variable angle 'Rotacota' rotary planetary stage - with 50mm ? specimen platform * Flat rotation stage for 100mm/4" wafers * Rotation stage for glass microscope slides. Other options* Extended height chamber - for tall specimens* Film thickness monitor (FTM) - the optional FTM attachment (10454) consists of a controller and quartz crystal oscillator built into the KQ150R and a vacuum feed-through, chamber-mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited. | ||||||||||||||||||||||||||||||||||||||||||||
| Specifications |
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Ordering Information
| KQ150R S | 10417 | Rotary pumped sputter coater, includes an SC502-314A 57mm ? x 0.1mm gold target |
| Inserts and accessories fitted as standard | 10587 | Quick-release sputter insert for KQ150R S and KQ150R ES - suitable for non-oxidising (noble) metals. Supplied with SC502-314A 57mm ? x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
| 10067 | Rotation stage, 50mm ? with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt - for tilting stage see Specimen Stages section | |
| KQ150R E | 10419 | Rotary pumped carbon fibre evaporator, supplied with carbon fibre / cord |
| Inserts and accessories fitted as standard | 10355 | Quick-release carbon fibre evaporation insert for KQ150R E and KQ150R ES - suitable for evaporation of carbon fibre and carbon cord |
| 10067 | Rotation stage, 50mm ? with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt - for tilting stage see Specimen Stages section | |
| KQ150R ES | 10418 | Rotary pumped sputter coater, includes an SC502-314A 57mm ? x 0.1mm gold target, and carbon fibre evaporator, supplied with carbon fibre / cord |
| Inserts and accessories fitted as standard | 10587 | Quick-release sputter insert for KQ150R S and KQ150R ES - suitable for non-oxidising (noble) metals. Supplied with SC502-314A 57mm ? x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section |
| 10355 | Quick-release carbon fibre evaporation insert for KQ150R E and KQ150R ES - suitable for evaporation of carbon fibre and carbon cord | |
| 10067 | Rotation stage, 50mm ? with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt - for tilting stage see Specimen Stages section | |
| Rotary pump requirements (needs to be ordered separately) | 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter. (order separately, see page V4 and K6) | |
| Options and accessories | 10879 | Carbon rod evaporation insert for 3.05mm ? rods (R E and R ES only). Includes S8651 manual rod shaper and C5422 (3.05mm ? x 300mm pack of ten) carbon rods |
| 10262 | Glow discharge insert. Used to modify surface properties (eg hydrophobic to hydrophilic conversion) (R S and R ES versions only). Can be retrofitted | |
| 10726 | Additional sputter insert for quick metal change (R E and R ES versions only). NB: This is an entire sputtering assembly; individual targets can also be purchased | |
| 10360 | Variable angle 'Rotacota' rotary planetary specimen stage (rotational speed 8-20 RPM). 50mm ? specimen platform with six stub positions for 15mm, 10mm, 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8-20 RPM | |
| 10357 | Variable tilt angle specimen stage with adjustable tilt up to 90?. 50mm ? specimen platform with six stub positions for 15mm, 10mm, 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8-20 RPM | |
| 10458 | Flat rotation specimen stage for 100mm/4" wafers, includes gear box for increased coverage. Stage rotation speed variable between 8-20 RPM | |
| 10358 | 90mm ? specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8-20 RPM. Includes gear box to allow optional FTM to be used | |
| 10454 | Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals | |
| 10429 | Extended height vacuum chamber (214mm in height - the standard chamber is 127mm high). For increased source to specimen distance and for coating large specimens | |
| 10731 | Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the KQ150R when bench depth is limited | |
| Sputter targets | NB: The KQ150R S and KQ150R ES are fitted as standard with a 0.1mm thick gold (Au) target (SC502-314A). Other optional targets: | |
| For other optional targets - ask | ||
| Carbon supplies | Carbon fibre/cord, graphite rods and rod shapers on page V1 | |
| Other consumables and spare kits | ||
| Metal evaporation baskets on page V1 | ||
| For spare parts - Inquire | ||
Links
For information on the KQ150T, and the sputter and carbon coating techniques, visit the Preparation Techniques and Advantages page.
To view sputter and carbon coating images, visit the Image Gallery.