SAFETY DATA SHEET
Hexamethyldisilasane (HMDS)
1. IDENTIFICATION
Product Identifiers
Product Name:
Hexamethyldisilasane
Other Names:
HMDS
Product Number(s):
C108
CAS Number:
999-97-3
Recommended use of the chemical and restriction on use
Laboratory use.
Company Details
ProSciTech Pty Ltd
11 Carlton Street
KIRWAN QLD 4817
Australia(07) 4773 9444www.proscitech.com
11 Carlton Street
KIRWAN QLD 4817
Australia(07) 4773 9444www.proscitech.com
Emergency Contact Details
ProSciTech Pty Ltd
11 Carlton Street
KIRWAN QLD 4817
Australia(07) 4773 9444www.proscitech.com
11 Carlton Street
KIRWAN QLD 4817
Australia(07) 4773 9444www.proscitech.com
2. HAZARDS IDENTIFICATION
Classification of the substance or mixture
GHS02 flame
Flam. Liq. 2 H225 Highly flammable liquid and vapour.
GHS07 Acute Tox. 4 H302 Harmful if swallowed.
Skin Irrit. 2 H315 Causes skin irritation.
Eye Irrit. 2 H319 Causes serious eye irritation.
STOT SE 3 H335 May cause respiratory irritation.
GHS06 Skull and crossbones
Acute toxicity - oral 3 H301 Toxic if swallowed.
Flam. Liq. 2 H225 Highly flammable liquid and vapour.
GHS07 Acute Tox. 4 H302 Harmful if swallowed.
Skin Irrit. 2 H315 Causes skin irritation.
Eye Irrit. 2 H319 Causes serious eye irritation.
STOT SE 3 H335 May cause respiratory irritation.
GHS06 Skull and crossbones
Acute toxicity - oral 3 H301 Toxic if swallowed.
Label Elements
Signal Words
Danger
Hazard Statement(s)
Highly flammable liquid and vapour.
Toxic if swallowed.
Causes skin irritation.
Causes serious eye irritation.
May cause respiratory irritation.
Toxic if swallowed.
Causes skin irritation.
Causes serious eye irritation.
May cause respiratory irritation.
Precautionary Statement(s)
Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
Ground / bond container and receiving equipment.
Use explosion-proof [electrical/ventilating/lighting] equipment.
Use non-sparking tools.
Take action to prevent static discharge.
Avoid breathing dust/fume/gas/mist/vapours/spray
Wash thoroughly after handling.
Do not eat, drink or smoke when using this product.
Use only outdoors or in a well-ventilated area.
Wear protective gloves/protective clothing/eye protection/face protection/hearing protection.
Ground / bond container and receiving equipment.
Use explosion-proof [electrical/ventilating/lighting] equipment.
Use non-sparking tools.
Take action to prevent static discharge.
Avoid breathing dust/fume/gas/mist/vapours/spray
Wash thoroughly after handling.
Do not eat, drink or smoke when using this product.
Use only outdoors or in a well-ventilated area.
Wear protective gloves/protective clothing/eye protection/face protection/hearing protection.
Primary route(s) of entry
Not available.
Human Health
Inhalation:
In case of irregular breathing or respiratory arrest provide artificial respiration.
In case of unconsciousness place patient stably in side position for transportation.
In case of unconsciousness place patient stably in side position for transportation.
Ingestion:
Do not induce vomiting; call for medical help immediately. Rinse mouth.
Eyes:
Rinse opened eye for several minutes under running water. If symptoms persist, consult a doctor.
Skin:
Immediately remove any clothing soiled by the product.
Immediately wash with water and soap and rinse thoroughly.
Immediately wash with water and soap and rinse thoroughly.
Environment
Store in a well-ventilated place. Keep container tightly closed.
Store in a well-ventilated place. Keep cool.
Store locked up.
Dispose of contents/container in accordance with local/regional/national/international regulations.
Store in a well-ventilated place. Keep cool.
Store locked up.
Dispose of contents/container in accordance with local/regional/national/international regulations.
3. COMPOSITION/INFORMATION ON INGREDIENTS
Name
CAS No.
Content (w/w)
Classification
1,1,1,3,3,3-hexamethyldisilazane
999-97-3
<= 100 %
Flam. Liq. 2; Acute Tox. 4;Acute Tox. 3; H225, H302, H332, H311
4. FIRST AID MEASURES
Ingestion
Do not induce vomiting; call for medical help immediately.
Inhalation
In case of unconsciousness place patient stably in side position for transportation.
Skin Contact
Immediately wash with water and soap and rinse thoroughly.
Eye Contact
Rinse opened eye for several minutes under running water. If symptoms persist,
Other Information
Immediately remove any clothing soiled by the product.
In case of irregular breathing or respiratory arrest provide artificial respiration.
In case of irregular breathing or respiratory arrest provide artificial respiration.
5. FIREFIGHTING MEASURES
Suitable extinguishing equipment
CO₂, sand, extinguishing powder. Do not use water.For safety reasons unsuitable extinguishing agents: Water with full jet
HAZCHEM
Not available.
Special protective equipment and precautions for fire fighters
6. ACCIDENTAL RELEASE MEASURES
Personal precautions, protective equipment and emergency procedures
Wear protective equipment. Keep unprotected persons away.
Environmental precautions
Do not allow to enter sewers/ surface or ground water. Dilute with plenty of water
Methods and materials for containment and clean up
Absorb with liquid-binding material (sand, diatomite, acid binders, universal binders, sawdust).
Dispose contaminated material as waste according to item 13.
Ensure adequate ventilation.
Do not flush with water or aqueous cleansing agents
Dispose contaminated material as waste according to item 13.
Ensure adequate ventilation.
Do not flush with water or aqueous cleansing agents
7. HANDLING AND STORAGE
Precautions for safe handling
Advice on safe handling
Work under hood. Do not inhale substance/mixture. Avoid generation of vapours/aerosols.
Advice on protection against fire and explosion
Flash back possible over considerable distance.Container explosion may occur under fire
conditions.Keep away from open flames, hot surfaces and sources of ignition.Take
precautionary measures against static discharge.
Hygiene measures
Immediately change contaminated clothing. Apply preventive skin protection. Wash hands
and face after working with substance.
Work under hood. Do not inhale substance/mixture. Avoid generation of vapours/aerosols.
Advice on protection against fire and explosion
Flash back possible over considerable distance.Container explosion may occur under fire
conditions.Keep away from open flames, hot surfaces and sources of ignition.Take
precautionary measures against static discharge.
Hygiene measures
Immediately change contaminated clothing. Apply preventive skin protection. Wash hands
and face after working with substance.
Conditions for safe storage
Keep container tightly closed in a dry and well-ventilated place. Keep away from heat and
sources of ignition. Keep locked up or in an area accessible only to qualified or authorised
persons.
Hydrolyzes readily.
Storage class
Storage class (TRGS 510): 3: Flammable liquids
8. EXPOSURE CONTROLS/PERSONAL PROTECTION
Exposure Standards
Engineering controls
Contains no substances with occupational exposure limit values.
Personal protective equipment
Eye and face protection
Avoid contact with the eyes.
Wear tightly sealed goggles.
Wear tightly sealed goggles.
Skin protection
This recommendation applies only to the product stated in the safety data sheet, supplied by us and for the designated use. When dissolving in or mixing with other substances and under conditions deviating from those stated in EN 16523-1 please contact the supplier of CE-approved gloves (e.g. KCL GmbH, D-36124 Eichenzell, Internet: www.kcl.de).
Full contact
Material: Nitrile rubber
Minimum layer thickness: 0.4 mm
Break through time: 480 min
Material tested:Camatril® (KCL 730 / Aldrich Z677442, Size M)
This recommendation applies only to the product stated in the safety data sheet, supplied by us and for the designated use. When dissolving in or mixing with other substances and under conditions deviating from those stated in EN 16523-1 please contact the supplier of CE-approved gloves (e.g. KCL GmbH, D-36124 Eichenzell, Internet: www.kcl.de).
Splash contact
Material: Chloroprene
Minimum layer thickness: 0.65 mm
Break through time: 240 min
Material tested:KCL 720 Camapren®
Full contact
Material: Nitrile rubber
Minimum layer thickness: 0.4 mm
Break through time: 480 min
Material tested:Camatril® (KCL 730 / Aldrich Z677442, Size M)
This recommendation applies only to the product stated in the safety data sheet, supplied by us and for the designated use. When dissolving in or mixing with other substances and under conditions deviating from those stated in EN 16523-1 please contact the supplier of CE-approved gloves (e.g. KCL GmbH, D-36124 Eichenzell, Internet: www.kcl.de).
Splash contact
Material: Chloroprene
Minimum layer thickness: 0.65 mm
Break through time: 240 min
Material tested:KCL 720 Camapren®
Body protection
Keep away from foodstuffs, beverages and feed.
Immediately remove all soiled and contaminated clothing
Flame retardant antistatic protective clothing.
Immediately remove all soiled and contaminated clothing
Flame retardant antistatic protective clothing.
Respiratory protection
required when vapours/aerosols are generated. Our recommendations on filtering respiratory protection are based on the following standards: DIN EN 143, DIN 14387 and other accompanying standards relating to the used respiratory protection system.
9. PHYSICAL AND CHEMICAL PROPERTIES
General information
Appearance
Colourless liquid
Odour
Ammonia-like
pH
8.5
Vapour Pressure
0.774 g/cm³
Density
0.774 g/mL at 25 °C
Boiling Point
126 °C
Melting Point
-82 °C
Solubility
insoluble
Specific Gravity of Density
0.774 g/cm³
Flash Point
11 °C
Flammable (Explosive) Limits
Not applicable.
Product is not explosive. However, formation of explosive air/vapour mixtures are possible.
Product is not explosive. However, formation of explosive air/vapour mixtures are possible.
Ignition Temperature
380.0 °C
Formula
Not available.
10. STABILITY AND REACTIVITY
Reactivity
Vapors may form explosive mixture with air.
Chemical stability
The product is chemically stable under standard ambient conditions (room temperature). Hydrolyzes readily.
Possibility of hazardous reactions
No further relevant information available.
Conditions to avoid
Ammonia is formed upon contact with water or humid air. Warming.
Incompatible materials
No further relevant information available.
11. TOXICOLOGICAL INFORMATION
Acute effects
Acute toxicity
LD50 Oral - Rat - male and female - 851 mg/kg
(OECD Test Guideline 401)
LC50 Inhalation - Rat - male and female - 6 h - 10 mg/l
(OECD Test Guideline 403)
LD50 Dermal - Rabbit - male and female - 547 - 589 mg/kg
(OECD Test Guideline 402)
LD50 Oral - Rat - male and female - 851 mg/kg
(OECD Test Guideline 401)
LC50 Inhalation - Rat - male and female - 6 h - 10 mg/l
(OECD Test Guideline 403)
LD50 Dermal - Rabbit - male and female - 547 - 589 mg/kg
(OECD Test Guideline 402)
Eye contact
Irritating effect.
Skin contact
Irritant to skin and mucous membranes.
Ingestion
No further relevant information available.
Inhalation
No further relevant information available.
Toxicity and irritation
Repeated dose toxicity - Rat - male and female - inhalation (vapour)
RTECS: JM9230000
Material is extremely destructive to tissue of the mucous membranes and upper respiratorytract, eyes, and skin., spasm, inflammation and edema of the larynx, spasm, inflammation and edema of the bronchi, pneumonitis, pulmonary edema, burning sensation, Cough, wheezing, laryngitis, Shortness of breath, Headache, Nausea, Vomiting, To the best of our knowledge, the chemical, physical, and toxicological properties have not been thoroughly investigated.
RTECS: JM9230000
Material is extremely destructive to tissue of the mucous membranes and upper respiratorytract, eyes, and skin., spasm, inflammation and edema of the larynx, spasm, inflammation and edema of the bronchi, pneumonitis, pulmonary edema, burning sensation, Cough, wheezing, laryngitis, Shortness of breath, Headache, Nausea, Vomiting, To the best of our knowledge, the chemical, physical, and toxicological properties have not been thoroughly investigated.
12. ECOLOGICAL INFORMATION
Ecotoxicity
Toxicity to fish semi-static test LC50 - Danio rerio (zebra fish) - 88 mg/l - 96 h (Directive 67/548/EEC, Annex V, C.1.)
Toxicity to daphnia and other aquatic invertebrates static test EC50 - Daphnia magna (Water flea) - 80 mg/l - 48 h (Directive 67/548/EEC, Annex V, C.2.)
Toxicity to algae EC50 - Desmodesmus subspicatus (green algae) - 19.00 mg/l - 72 h
Toxicity to daphnia and other aquatic invertebrates static test EC50 - Daphnia magna (Water flea) - 80 mg/l - 48 h (Directive 67/548/EEC, Annex V, C.2.)
Toxicity to algae EC50 - Desmodesmus subspicatus (green algae) - 19.00 mg/l - 72 h
Persistence and degradability
Biodegradability aerobic - Exposure time 28 d
Result: 15.3 % - Not readily biodegradable.
(Directive 67/548/EEC Annex V, C.4.E.)
Result: 15.3 % - Not readily biodegradable.
(Directive 67/548/EEC Annex V, C.4.E.)
Bioaccumulative potential
No further relevant information available.
Other adverse effects
No further relevant information available.
13. DISPOSAL CONSIDERATIONS
General information
Must not be disposed together with household garbage. Do not allow product to reach sewage system.
Disposal must be made according to official regulations.
Disposal must be made according to official regulations.
14. TRANSPORT INFORMATION
ADG label required
HAZCHEM
Not available.
UN Number
UN3286
Proper shipping name
DOT Flammable liquid, toxic, corrosive, n.o.s.
ADR 3286 FLAMMABLE LIQUID, TOXIC, CORROSIVE, N.O.S.
IMDG, IATA FLAMMABLE LIQUID, TOXIC, CORROSIVE, N.O.S.
ADR 3286 FLAMMABLE LIQUID, TOXIC, CORROSIVE, N.O.S.
IMDG, IATA FLAMMABLE LIQUID, TOXIC, CORROSIVE, N.O.S.
Transport hazard class
3 Flammable liquids
Packing group
PG II
Environmental hazard
Marine pollutant
Special precautions for users
· Special precautions for user Warning: Flammable liquids
· Hazard identification number (Kemler code): 33
· EMS Number: F-E,S-E
· Hazard identification number (Kemler code): 33
· EMS Number: F-E,S-E
Additional information
None
15. REGULATORY INFORMATION
Poisons Schedule Number
Therapeutic Goods (Poisons Standard) : No poison schedule number
Instrument allocated
Instrument allocated
Other Information
Sara
· Section 355 (extremely hazardous substances):
Substance is not listed.
· Section 313 (Specific toxic chemical listings):
Substance is not listed.
· TSCA (Toxic Substances Control Act):
ACTIVE
· Hazardous Air Pollutants
Substance is not listed.
Proposition 65
· Chemicals known to cause cancer:
Substance is not listed.
· Chemicals known to cause reproductive toxicity for females:
Substance is not listed.
· Chemicals known to cause reproductive toxicity for males:
Substance is not listed.
· Chemicals known to cause developmental toxicity:
Substance is not listed.
· Carcinogenic categories
· EPA (Environmental Protection Agency)
Substance is not listed.
· TLV (Threshold Limit Value)
Substance is not listed.
· NIOSH-Ca (National Institute for Occupational Safety and Health)
Substance is not listed.
· Section 355 (extremely hazardous substances):
Substance is not listed.
· Section 313 (Specific toxic chemical listings):
Substance is not listed.
· TSCA (Toxic Substances Control Act):
ACTIVE
· Hazardous Air Pollutants
Substance is not listed.
Proposition 65
· Chemicals known to cause cancer:
Substance is not listed.
· Chemicals known to cause reproductive toxicity for females:
Substance is not listed.
· Chemicals known to cause reproductive toxicity for males:
Substance is not listed.
· Chemicals known to cause developmental toxicity:
Substance is not listed.
· Carcinogenic categories
· EPA (Environmental Protection Agency)
Substance is not listed.
· TLV (Threshold Limit Value)
Substance is not listed.
· NIOSH-Ca (National Institute for Occupational Safety and Health)
Substance is not listed.
16. OTHER INFORMATION
SDS preparation date
4 February 2026
Comments
Abbreviations and acronyms:
ADR: Accord relatif au transport international des marchandises dangereuses par route (European Agreement Concerning the International
Carriage of Dangerous Goods by Road)
IMDG: International Maritime Code for Dangerous Goods
DOT: US Department of Transportation
IATA: International Air Transport Association
EINECS: European Inventory of Existing Commercial Chemical Substances
CAS: Chemical Abstracts Service (division of the American Chemical Society)
NFPA: National Fire Protection Association (USA)
HMIS: Hazardous Materials Identification System (USA)
VOC: Volatile Organic Compounds (USA, EU)
PBT: Persistent, Bioaccumulative and Toxic
vPvB: very Persistent and very Bioaccumulative
NIOSH: National Institute for Occupational Safety
OSHA: Occupational Safety Health
TLV: Threshold Limit Value
PEL: Permissible Exposure Limit
REL: Recommended Exposure Limit
Flammable liquids 2: Flammable liquids - Category 2
Acute toxicity - oral 3: Acute toxicity - Category 3
Skin irritation 2: Skin corrosion/irritation - Category 2
Eye irritation 2A: Serious eye damage/eye irritation - Category 2A
Specific target organ toxicity (single exposure) 3: Specific target organ toxicity (single exposure) - Category 3
ADR: Accord relatif au transport international des marchandises dangereuses par route (European Agreement Concerning the International
Carriage of Dangerous Goods by Road)
IMDG: International Maritime Code for Dangerous Goods
DOT: US Department of Transportation
IATA: International Air Transport Association
EINECS: European Inventory of Existing Commercial Chemical Substances
CAS: Chemical Abstracts Service (division of the American Chemical Society)
NFPA: National Fire Protection Association (USA)
HMIS: Hazardous Materials Identification System (USA)
VOC: Volatile Organic Compounds (USA, EU)
PBT: Persistent, Bioaccumulative and Toxic
vPvB: very Persistent and very Bioaccumulative
NIOSH: National Institute for Occupational Safety
OSHA: Occupational Safety Health
TLV: Threshold Limit Value
PEL: Permissible Exposure Limit
REL: Recommended Exposure Limit
Flammable liquids 2: Flammable liquids - Category 2
Acute toxicity - oral 3: Acute toxicity - Category 3
Skin irritation 2: Skin corrosion/irritation - Category 2
Eye irritation 2A: Serious eye damage/eye irritation - Category 2A
Specific target organ toxicity (single exposure) 3: Specific target organ toxicity (single exposure) - Category 3
References
SDS EMS (HMDS) HEXAMETHYLDISILAZANE, REAGENT 20/04/2022 https://www.emsdiasum.com/docs/technical/msds/16700.pdf
Merk SDS Hexamethyldisilazane 18.12.2024 https://www.sigmaaldrich.com/AU/en/sds/sial/52619?userType=anonymous
Merk SDS Hexamethyldisilazane 18.12.2024 https://www.sigmaaldrich.com/AU/en/sds/sial/52619?userType=anonymous
This Safety Data Sheet (SDS) has been prepared in compliance with the Preparation of Safety Data Sheets for Hazardous Chemicals Code of Practice February 2016. It is the user's responsibility to determine the suitability of this information for adoption of necessary safety precautions. The information published in this SDS has been compiled from the publications listed in Section 16: to the best of our ability and knowledge these publications are considered accurate. We reserve the right to revise Safety Data Sheets as new information becomes available. Copies may be made for non-profit use.